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Process and device for storing measuring data from sub-domains of a sputter crater produced and analyzed in a secondary ion mass spectrometer
Process and device for storing measuring data from sub-domains of a sputter crater produced and analyzed in a secondary ion mass spectrometer
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机译:用于存储来自二次离子质谱仪中产生和分析的溅射坑的子域的测量数据的方法和装置
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摘要
A method and an apparatus for storing measured data from a sputter crater which is generated and analyzed in a secondary ion mass spectrometer is considerably more simple and cost-effective than techniques requiring complete data storage and is an improvement over the known standard integral method. The region swept by the ion beam of a secondary ion mass spectrometer is subdivided into a plurality of sub-areas, one location in a memory is assigned to each of the sub-areas, the signal components occurring from the individual sub-areas are stored in the assigned memory locations during a sweep of the sputter crater with the ion beam, and the measured data are evaluated after the end of at least one scan of the sputter crater.
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