PROCESS FOR FABRICATING THIN METAL SUPERCONDUCTING FILMS OF IMPROVED THERMAL CYCLABILITY AND DEVICE

摘要

Process for fabricating thin film electrodes particularly suited for Josephson devices of improved thermal cyclability comprising the steps of depositing thin films of superconductive metal and an intermetallic compound former on a substrate held at a temperature below about 100 DEG K and at a pressure below about 1 x 10-7 Torr so that intermetallic compound formation occurs at the grain boundaries of the metal to inhibit grain growth. The thin film electrodes are characterized by median grain size of 100 nm.