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IGNITION METHOD AND APPARATUS FOR SUPERHIGH FREQUENCY ION SOURCE
IGNITION METHOD AND APPARATUS FOR SUPERHIGH FREQUENCY ION SOURCE
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机译:超高频离子源的点火方法和装置
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摘要
Process and device of the ignition of a source of ions grid / p & & p & the process of the ignition of an ion source transistor using a known manner a cavity resonant 9 powered by a gas or vapor of a material intended to form a plasma, a system for injecting 8 in the cavity of a power transistor and a system for extracting 14 of the ions of the plasma out of the cavity, characterizes in that the cavity being of the multimode type, it creates, within the medium to be ionized, of the microorganisms producing and it maintains the plasma after its ignition with the aid of the power transistor.
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