MICROWAVE EXCITED HELIUM PLASMA BEAM ION DETECTOR

• 1. 一种同轴等离子体炬及低功率微波微等离子体激发装置 [P] . 中国专利： CN113923847A . 2022-01-11
• 2. 微波等离子体装置及等离子体激发方法 [P] . 中国专利： CN110049614A . 2019-07-23
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  机译： 微波激发氦等离子体光电离检测器

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  机译： 微波激发氦等离子体光电离检测器

• 5. Method for treating of surfaces and materials by microwave plasma entails producing microwave-excited plasma microwave-conducting waveguide and adapting field construction of plasma movement to defined run length [P] . 德国专利： DE102004053003A1 . 2006-05-04

  机译： 微波等离子体处理表面和材料的方法需要产生微波激发等离子体传导微波的波导，并使等离子体运动的场结构适应规定的行程

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• 1. Comparison of α particle detectors based on single-crystal diamond films grown in two types of gas atmospheres by microwave plasma-assisted chemical vapor deposition [J] . Yan-zhao Guo ,Jun-jun Wei ,Jian-peng Xing . 矿物冶金与材料学报 . 2020,第005期
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• 3. 介质波导激发微波等离子体和微秒脉冲等离子体的实验研究 [A] . 聂宗福 . 2009