机译:通过Helicon天线激发氦等离子体中磁场构造的曝光条件的修改
College of Physics and Optoelectronic Engineering Shenzhen University Shenzhen 518060 People's Republic of China;
Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province College of Physics and Optoelectronic Engineering Shenzhen University Shenzhen 518060 People's Republic of China;
Advanced Energy Research Center Shenzhen University Shenzhen 518060 People's Republic of China;
School of Physical Science and Technology Soochow University Suzhou 215123 People's Republic of China;
College of Physics and Optoelectronic Engineering Shenzhen University Shenzhen 518060 People's Republic of China;
Advanced Energy Research Center Shenzhen University Shenzhen 518060 People's Republic of China;
College of Physics and Optoelectronic Engineering Shenzhen University Shenzhen 518060 People's Republic of China;
Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province College of Physics and Optoelectronic Engineering Shenzhen University Shenzhen 518060 People's Republic of China;
School of Physical Science and Technology Soochow University Suzhou 215123 People's Republic of China;