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FORMATION OF CHARGE-TRANSFER COMPLEX

机译:电荷转移复合物的形成

摘要

PURPOSE:To enable the formation of many kinds of charge-transfer complexes with little restriction on the use of anions by mixing a charge donating compound (donor) with photodegradable salts or laminating the donor on the salts and irradiating the mixture or laminate with light. CONSTITUTION:A donor such as tetrathiafluvalene is mixed with photodegradable salts each generating an anion capable of forming a charge- transfer complex with the donor when irradiated with ultraviolet rays or visible light, e.g., a halogen anion, or the donor is laminated on the salts. The mixture or laminate is irradiated with light to form charge-transfer complexes. Since many kinds of anions can be used by this method, when this method is applied to the formation of a resist or the like, the optical or electrical properties of the resist can be changed in a wide range, so this method is very advantageous.
机译:目的:通过将给电子化合物(施主)与可光降解的盐混合或将施主层压在盐上,然后用光照射混合物或层压板,以形成对阴离子使用几乎没有限制的多种电荷转移络合物。组成:供体,例如四硫杂氟戊烯与可光降解的盐混合,当用紫外线或可见光(例如卤素阴离子)照射时,它们各自会生成能与供体形成电荷转移络合物的阴离子,或者将供体层压在盐上。用光照射混合物或层压材料以形成电荷转移复合物。由于该方法可以使用多种阴离子,因此当将该方法应用于抗蚀剂等的形成时,可以在宽范围内改变抗蚀剂的光学或电学性质,因此该方法是非常有利的。

著录项

  • 公开/公告号JPS61148441A

    专利类型

  • 公开/公告日1986-07-07

    原文格式PDF

  • 申请/专利权人 TOSHIBA CORP;

    申请/专利号JP19840270954

  • 发明设计人 TAKATO TAKAKI;MIURA AKIRA;

    申请日1984-12-24

  • 分类号G03F7/004;G03C1/00;G03C1/72;G03C1/73;G03C5/00;G03F7/038;

  • 国家 JP

  • 入库时间 2022-08-22 07:48:05

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