DEVICE FOR FLOWING CLEAN AIR FROM FILTER FRAME IN FILTER SYSTEM SUSPENDED FROM CEILING OF WHOLE LAMINAR FLOW TYPE CLEAN ROOM

摘要

PURPOSE:To obtain a filter system suspended from the ceiling, having improved filter efficiency and decreased dead space by permitting clean air to flow out of a filter frame as well. CONSTITUTION:A filter frame 6 is formed by jointing and fixing a frame material 1 constructed of a hollow square material and a frame material 3 for attaching illuminating equipments constructed of a square structure angle having an opening 2 on the rear surface, leaving each a little smaller square space 5 than the filter 4. One or more long holes 8 are provided to an upper plate 7 of the frame material 1 constructing the filter frame 6 along the longitudinal direction, and many small holes 10 are bored over the whole surface of a base plate 9 of the frame material 1. Small filters 11 are arranged so as to cover each long hole 8, and clean air is supplied to a clean room through the small filter 11, long holes 8, and small holes 10.