首页> 外国专利> METHOD FOR PRODUCING A PRESENT RADIATION WINDOW FLUID ON AN SI (LI) DRIFT DETECTOR

METHOD FOR PRODUCING A PRESENT RADIATION WINDOW FLUID ON AN SI (LI) DRIFT DETECTOR

机译:在SI(LI)漂移探测器上产生当前辐射窗流体的方法

摘要

Claim 1: A method for producing a predetermined surface of the radiation entrance window on a Si (Li) -Driftdetektor, characterized in that provided by the drift process, the entire intended for the generation of the beam entrance window surface of the silicon body (1) with a partially injecting, partly p-type Contact layer is provided and in the subsequent further processing of the drift detector, the injecting contact layer at least in the vicinity of the beam entrance window, for example is removed by lapping or etching. Fig.1-3
机译:权利要求1:一种用于在Si(Li)-漂移探测器上产生辐射入射窗的预定表面的方法,其特征在于,通过漂移工艺,提供了用于产生硅体的射束入射窗表面的整个过程( 1)设有部分注入的,部分为p型的接触层,并且在随后的漂移检测器的进一步处理中,至少在光束入射窗附近的注入的接触层例如通过研磨或蚀刻被去除。图1-3

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号