Manufacturing method of ultraprecision silicon bar

摘要

The present invention relates to a process for the manufacture of ultra-pure silica rods. The present invention relates to a process for the manufacture of silicon bars in a pyrosol decompener of monosilane feeding the decomposer. ON A SUPPORT BAR WHICH HAS BEEN PREHEATERLY HEATED TO RED, CHARACTERIZED IN THAT THE REACTIONAL MIXTURE COMING OUT OF THE DECOMPOSER IS RECYCLED IN MAJORITY TO THE SUPPLY OF THE DECOMPOSER. / P P THE BARS OBTAINED BEING USABLE IN THE ELECTRONIC INDUSTRY SEMICONDUCTORS. / P