MICRO-FACTORY ACCELEROMETER WITH ELECTROSTATIC RECALL

摘要

ACCELEROMETER ACCORDING TO THE INVENTION USES AT LEAST ONE SENSOR WITH PLANAR PENDULUM STRUCTURE REALIZED BY MICRO-MACHINING A FINE MONOCRYSTAL PLATE 1 AND COMPRISING A FLAT MOBILE MASS 3 SUSPENDED AT THE REST OF THE STRUCTURE THROUGH TWO PARALLEL THIN BLADES 4, 5 SITUATED ON EACH OTHER THAN EACH MASS3. THIS MASS 3 INCLUDES AT LEAST ONE MOBILE CONDENSER ARMATURE ARRANGED BETWEEN TWO FIXED CAPACITOR FRAMES PROVIDED ON THE FIXED PART OF THE PENDULUM ELEMENT. MOBILE REINFORCEMENT IS EXTENDED AT VOLTAGE V, WHILE THE FIXED FRAMEWORKS ARE RESPECTIVELY AFFECTED AT VOLTAGES V AND V WHICH ARE LIKELY TO GENERATE AN ELECTROSTATIC RECALL STRENGTH ON THE MOBILE MASS 3. / P P THANKS TO THE SIMPLICITY OF THIS STRUCTURE AND THIS TYPE OF MOTORIZATION, IT IS POSSIBLE TO OBTAIN HIGHLY MINIATURIZED ACCELEROMETERS. / P