PURPOSE:To enhance the reactivity and heat efficiency of a reactive substance, by supplying a first reactive substance in the arc plasma flame generated in a torch while supplying a second reactive substance in the space provided to the upper part in a reaction tube and corresponding to the outside part of the torch. CONSTITUTION:After the air in the apparatus is excluded through a conduit 14 to hold the apparatus under vacuum, the conduit 4 is closed and inert gas such as Ar is introduced into the apparatus to return said apparatus to atmospheric pressure. Next, a conduit 5 is opened to introduce gas from an arc plasma gas introducing port 8 and a torch 2 is ignited by a high frequency ignition device to obtain stable arc plasma. A second reactive substance is introduced from a second reactive substance introducing port 10 so as to envelope a plasma flame. Next, a first reactive substance is introduced from a first reactive substance introducing port 9 and exposed to high temp. in the plasma to be evaporated and decomposed while the vapor or decomposed product is quickly reacted with the second reactive substance and the reaction product leaves the reaction system to be recovered in a container 3.
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