MEASUREMENT FOR AUTOMATIC SELECTION OF SHORTEST PATH

摘要

PURPOSE:To enable automatically the decision of the order of measurement by a method wherein the X and Y coordinate values of each of the random measuring points on a semiconductor product are inputted in an automatic controlling device, the shortest path of the paths to pass through all of the random measuring points is calculated and the measurements are made in order along the shortest path. CONSTITUTION:The coordinate values of each of N pieces of the measuring points are inputted and the distance between two measuring points of N pieces of the measuring points is calculated in every two pieces. The total distance of the various paths to pass through in order N pieces of the measuring points is calculated. The paths comprise N! kinds, the shortest pattern of the paths of N! kinds is selected and the order of the path is decided. While the measuring points are made to move in order according to the order decided, the measurement is conducted, the number of times of measurement is calculated and when the measurement of N times is calculated, the measuring operation finishes. By the above-mentioned procedures, N pieces of the measuring points are automatically measured along the shortest path.