首页> 外国专利> Brief description of embodiments of the two mos juxtaposed different structures and different dopings and frame transfer matrix is obtained by this

Brief description of embodiments of the two mos juxtaposed different structures and different dopings and frame transfer matrix is obtained by this

机译:由此获得两个并置不同结构和不同掺杂和帧传输矩阵的mos的实施例的简要描述。

摘要

The present invention consists in deposit a layer 1 of polycrystalline silicon doped on a dielectric of silica, which insulates it from the substrate. A photolithography makes it possible to to define the areas intended to undergo an ion implantation embedded in the channel 11, the zones a protect masked given by the silicon remaining. / p & & p & a double layer of nitride, silica - 12, 13 is formed after putting a core of the substrate in the regions implanted. / p & & p & a photolithographic etching of the double layer of nitride, silica - makes it possible to access to the first level of silicon of a second layer of silicon doped 9. / p & & p & the photolithography of the assembly of two silicons makes it possible to carry out various structures in which, for example, the transition zone of the two dielectric is located under the same grid, or else in which, for example, the transition zone is self - aligned has a gate. / p & & p & matrices a frame transfer.
机译:本发明在于沉积掺杂在二氧化硅电介质上的多晶硅层1,该多晶硅层1将其与衬底绝缘。光刻使得可以限定意图进行嵌入在通道11中的离子注入的区域,这些区域被剩余的硅所掩盖。 & &在将衬底的芯放入注入的区域后,形成氮化物二氧化硅-12、13的双层。 & &对氮化物双层二氧化硅的光刻蚀刻使得可以进入掺杂有硅的第二层9的硅的第一层。 & &两种硅组件的光刻技术使得可以执行各种结构,其中,例如,两个电介质的过渡区位于同一栅格下,或者例如,过渡区是自-对齐的有一扇门。 & &矩阵帧传输。

著录项

  • 公开/公告号FR2577715B1

    专利类型

  • 公开/公告日1987-03-20

    原文格式PDF

  • 申请/专利权人 THOMSON CSF;

    申请/专利号FR19850002366

  • 发明设计人 PIERRE BLANCHARD;

    申请日1985-02-19

  • 分类号H01L21/82;H01L21/28;H01L29/78;

  • 国家 FR

  • 入库时间 2022-08-22 07:11:26

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