DEVICE FOR MEASURING THE ORIENTATION OF MONOCRYSTALLINE MASSIVE MATERIALS BY THE LAUNE METHOD

摘要

P DEVICE FOR MEASURING THE ORIENTATION OF MONOCRYSTALLINE MASSIVE MATERIALS BY THE METHOD OF THE LAUNCHER CHAMBER COMPRISING SUPPORT MEANS FOR A MASSIVE SAMPLE AND ALIGNMENT MEANS FOR THE LAUNCHER CHAMBER AND THE SUPPORT MEANS, CHARACTERIZED IN THAT THE MEANS OF SUPPORT INCLUDE A SAMPLE HOLDER 10 WHICH PRESENTS A FIRST FACE PLANE 1 TO RECEIVE THE SAMPLE, A SECOND FACE PLANE 2 PERPENDICULAR TO THE FIRST TO BLOCK THE SAMPLE, A FIRST 11 AND A SECOND 12 PLANS OF REFERENCE RESPECTIVELY PARALLEL TO FIRST 1 AND SECOND 2 FACES PLANES, AND THIRD REFERENCE PLAN 13 PERPENDICULAR TO BOTH FIRST 1 AND SECOND 2 FACES PLANES, IN THAT THE MEANS OF ALIGNMENT CONSIST IN A BENCH OPTICAL B HAVING AT LEAST TWO REFERENCE PLANS 21, 22 PARALLEL TO THE OPTICAL AXIS OF THE LAUNCHER CHAMBER, WHICH SUPPORT DURING THE MEASUREMENT BE THE FIRST 11 AND THE SECOND 12, BE THE FIRST 11 AND THE THIRD 13 SAMPLE HOLDER REFERENCE PLANS 10. / P P APPLICATION: MEASUREMENT OF SINGLE CRYSTALS ORIENTATION FOR THE MANUFACTURE OF INTEGRATED CIRCUIT SUBSTRATES. / P