Method of controlling thermochemical treatment of workpieces in glow discharge in a treating gas medium and device which embodies this method

摘要

The method and device for controlling the thermo chemical treatment of workpieces in slow discharge in a medium of treating gas, includes operating stages of warm-up with simultaneous intensive cathode sputtering, diffusion saturation, and cooling of treated workpieces. During each stage the workpiece temperature, the frequency of occurring arc discharges and the glow discharge voltage are measured and compared with preset values. Corresponding error signals and control signals are obtained and used to regulate the treated workpiece temperature and the arc discharge frequency using the discharge current value, and the glow discharge voltage using the flow rate value of one of at least two treating gases that enter the working chamber, a preset value of glow discharge voltage corresponding to each treating gas.