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Vacuum pump system including serially connected rotary and reciprocating vacuum pumps
Vacuum pump system including serially connected rotary and reciprocating vacuum pumps
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机译:真空泵系统,包括串联的旋转和往复式真空泵
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摘要
A vacuum pump includes a rotary vacuum pump including a pair of rotors cooperating to suck gas, a driving source connected to a shaft of one of the pair of rotors, timing gears connected to respective shafts of the rotors and transmitting the driving force of the driving source between the shafts of the pair rotors, and a reciprocating vacuum pump connected to the driving source and connected to the downstream side of the rotary vacuum pump for sucking gas therefrom.
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