PURPOSE:To equalize a laser gas flow, and to obtain stable high-output laser beams by mounting a flow straightening grating into a ventilating duct into which a discharge electrode section is housed and arranged. CONSTITUTION:A discharge electrode section formed by main electrodes 1, 2 and a pre-ionizing electrode 3 is housed and disposed. A flow straightening grating 5 constituted by arranging a plurality of gas straightening vanes 6 to a latticed shape is disposed to a laser-gas inflow section for a ventilating duct 4 so that a central axis is positioned onto the same straight line as the central axis of a gas flow path flowing between the main electrodes 1, 2. According to the constitution, a laser gas flow flowing into the main electrodes 1, 2 from the ventilating duct 4 is changed into a laminar flow, thus stabilizing main discharge equalized extending over the overall length of the main electrodes 1, 2, then acquiring high-output laser beams.
展开▼
