ENERGY SCANNING TYPE X-RAY TOMOGRAPHIC IMAGING APPARATUS

摘要

PURPOSE:To measure an interatomic distance and an atomic distribution state with high accuracy, by continuously scanning a substance by X-ray energy from the vicinity of the absorption end of the arbitrary element in the substance to a high energy side. CONSTITUTION:X-rays from an X-ray source 1 are allowed to be incident to a specimen 4 through a detector 2 and the intensity of X-rays is detected by a detector 3. Said detector 3 is arranged in large numbers at a minute interval and the incident angle theta of X-rays is continuously changed between 0-90 deg.. The absorptivity of X-rays is measured in such a state that energy lower than the proper absorption end of an aiming element is set to a start point. Further, the energy of X-rays is allowed to continuously scan from the absorption end to a high energy side. At this time, an X-rays absorption spectrum mu is calculated from the X-ray intensity ratio of the detectors 2, 3 before and after X-rays are incident and EXAFS (Extended X-ray Absorption Fine Structure) is calculated from said spectrum. Since EXAFS is calculated, the distribution state of the element, the interatomic distance thereof and number of coordinations in a substance can be measured quantitatively.