METHOD AND APPARATUS FOR MEASURING THICKNESS OF LIQUID FILM ON PLATE-LIKE MATERIAL

摘要

PURPOSE:To facilitate measurement, by allowing X-rays transmitted through a liquid film to impinge against a plate-like material and measuring the quantity of fluorescent X-rays generated from the plate-like material and transmitted through the liquid film to calculate the thickness of the liquid film. CONSTITUTION:X-rays I0 emitted from an X-rays source 12 penetrate a liquid film 11 while being absorbed by said film 11 to impinge against the surface P of a plate like material 10 and fluorescent X-rays peculiar to the componential element of the plate-shaped material 10 are generated. The fluorescent X-rays are absorbed and attenuated while being transmitted through the liquid film 11 and the quantity thereof becomes I1 to be measured by a fluorescent X-ray detector 13. The signal detected by the fluorescent X-rays detectors 13 is inputted to an operational processing part 14 and the thickness of the liquid film 11 is calculated using a calibration curve prepared and the value thereof is displayed on a display part 16.