METHOD AND APPARATUS FOR REAL-TIME HIGH-SPEED INSPECTION OF OBJECTS FOR IDENTIFYING DEFECTS

摘要

METHOD OF AND APPARATUS FORREAL-TIME HIGH-SPEED INSPECTIONS OF OBJECTSFOR IDENTIFYING OR RECOGNIZING KNOWN ANDUNKNOWN PORTIONS THEREOF, INCLUDED DEFECTSAND THE LIKEAbstractThis disclosure is concerned with real-timehigh-speed inspection of objects involving storingdigital signal mask information of optical scans ofobjects at different magnifications, but with substan-tially the same field of view, and comparing digitalmask information obtained by run scans of objects-to-be-inspected, at different magnifications, with thestored mask information to identify known or unknownportions of the objects, with adaptability for rapid"teaching" of large sets of objects for storage andsubsequent comparison with real objects under inspec-tion.