METHOD OF AND APPARATUS FOR REAL-TIME HIGH-SPEED INSPECTION OF OBJECTS FOR IDENTIFYING OR RECOGNIZING KNOWN AND UNKNOWN PORTIONS THEREOF, INCLUDING DEFECTS AND THE LIKE.

摘要

process and apparatus for high speed inspection of objects in real time (figs.1, 2, 7 and 10) to store information for masking in digital signals (recognition memory) scans objects of different optical magnifications (figs.3, 5, 8, and 9), but with the same field of view, and to compare the data obtained by scanning a digital mask inspection of objects with different magnifications.the information stored for identifying parts of masking known or unknown objects.with the ability to adapt to a fast computer education objects for storage and subsequent comparisons with real objects under inspection.