APPARATUS AND METHOD FOR LOCAL CHEMICAL ANALYSIS ON THE SURFACE OF SOLID MATERIALS BY X-RAY PHOTO-ELECTRON SPECTROSCOPY

摘要

P THE APPARATUS FOR LOCAL CHEMICAL ANALYSIS ON THE SURFACE OF SOLID MATERIALS BY X-PHOTO ELECTRON SPECTROSCOPY INCLUDING AN ULTRAVID ANALYSIS CHAMBER 1 IN WHICH THE ANALYZER SAMPLE 2 WHICH IS CONNECTED TO A 3 HANDLER IS AVAILABLE OUTSIDE SUCH CHAMBER 1, AN ANALYZER 4 LOCATED NEAR THE SAMPLE AND A SOURCE OF ELECTRON 5 TRANSMITTING AN ELECTRONIC BEAM 10 IS CHARACTERIZED IN THAT IT CONTAINS BETWEEN ELECTRONIC BEAM 10 AND SAMPLE 2 WHICH 2 IS A SOLID SOLID MATERIAL, A MICROSOURCE OF PHOTONS X 6, AS CLOSER AS POSSIBLE AS SAID SAMPLE 2. /P