Apparatus and method of chemical analyses local reactions at the surface of solid materials by spectroscopy of photo - electrons x

摘要

The apparatus of the local chemical analyses on the surface of solid materials by spectroscopy of photo - electrons x comprising an analysis chamber 1 in an ultrahigh vacuum, which is housed the sample to be analyzed 2 which is connected to a manipulator 3 is provided at the packaging of the chamber 1, an analyzer 4 located at close to the sample and a source of electrons 5 emitting an electron beam 10 is characterizes in that it comprises, between the electron beam 10 and the sample 2 which is a solid, a microsource of x photons 6, the more pressure willing possible to the sample block 2.