PURPOSE:To achieve a continuous monitoring without replacing an SF6 decomposition gas detecting section, by forming a plurality of metal thin films on one substrate as SF6 decomposition gas sensitive film to arrange independent heater films therefor. CONSTITUTION:An SF6 decomposition gas sensor 7 comprises a plurality of SF6 decomposition gas detecting sections 8, which are each provided with an electrode 10 for heaters formed on a substrate 9, heater films 11 having a self- temperature controllability and an insulation film 12 covering the heater films 11. An electrode 13 for Ag thin films provided on the substrate 9 is provided with Ag thin films 14 acting as an SF6 decomposition gas sensitive film so arranged on the insulation film 12 to be insulated from the heater films 11. The SF6 decomposition gas sensor 7 is disposed in a container 15 sealed with an SF6 gas 1 and a conductor 17 for the Ag thin films led out through a terminal 16 and a conductor 18 for the heaters are connected selectively through a changeover switch.
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