HIGH-PURITY ALUMINUM NITRIDE ORDINARY-PRESSURE SINTERED COMPACT AND PRODUCTION THEREOF

摘要

PURPOSE:To obtain a high-purity AlN sintered compact having high density and excellent thermal conductivity and strength, by sintering an AlN powder having specific properties at ordinary pressure without adding any sintering auxiliary. CONSTITUTION:AlN powder having =3mu average particle size and =1.5wt.% O content and =0.3wt.% cation impurity is molded without adding any sintering auxiliary and the resultant moldings are sintered in a container consisting of AlN and/or BN moldings in ordinary-pressure N2 gas atmosphere at 1700-2100 deg.C to obtain the subject sinter compact having =3.225g/cm2 density or =99.0% relative density to theoretical density, =70W/m.K thermal conductivity at ambient temperature and =25kgf/mm2 flexural strength at 20 deg.C and 1200 deg.C.