COLD TRAP PROVIDED WITH REACTION PRODUCT RESERVOIR

摘要

PURPOSE:To recover the powder stripped off from the surface of a cold trap along with oil by fixing a vessel contg. oil to the bottom of the trap in the evacuating system of a vacuum device. CONSTITUTION:A reaction product reservoir 5 consisting of a vessel contg. the oil 6 having good diffusivity and capable of being easily neutralized is fixed to the bottom of the main cold trap body 3 through a butterfly valve 4. The valve 4 is closed when the trap is operated, and the reaction product stripped off from the inner surface 2 of the trap is recovered on the valve 4. When the cold trap is leaked and the valve 4 is opened, the recovered reaction product is dropped into the oil 6. When an oil valve 7 is then opened, the reaction product is removed along with the oil 6, and the oil is again supplied from an oil supply valve 8.