MECHANISM FOR EXCHANGING AND FIXING MONITOR GLASS OF OPTICAL MONITOR OF VACUUM EVAPORATION DEVICE

摘要

PURPOSE:To improve handleability of an optical monitor of a vacuum evaporation device and to make the fixing of glass easier and more exact by constructing an operating means for exchanging the glass in a structure permitting thermal expansion and forming the glass face and a surface of attaching and detaching the glass parallel to a reference plane of a cover plate of a vacuum tank. CONSTITUTION:When a clamp member 53 is opened completely and a lifting means is moved upwards in a state wherein a cartridge 5 is supported by a movable bearer 34 below a position for measuring the film thickness, the clamping member 53 is turned for closing by the lifting of a clamp means 14, and a top end of a glass holder 3 is held. Then, the glass holder 3 is shifted by an angle of rotation equal to a disposed pitch of the monitor glass 2 by the rotation of a rotary cylinder 11, and the displacement is sensed by an indexing sensor. Thereafter, the lifting means is lifted further until an attaching and detaching face 6B at a cartridge side comes to close contact with an attaching and detaching face 6A at a holding cylinder side, holding thus the glass surface of the monitor glass 2 after finishing the exchange at a parallel state to each reference plane, fixing the monitor glass at a position for measuring the film thickness.