METHOD AND APPARATUS FOR CONTROLLING RIGIDITY OF STATIC PRESSURE GAS BEARING

摘要

PURPOSE:To maintain high rigidity of a bearing by controlling gas pressure supplied to the bearing in proportion to the size of a bearing gap. CONSTITUTION:A gap detecting sensor 7 for detecting a bearing gap S is mounted on a bearing 2, and a signal from said sensor 7 is sent to the input of a control section 8 to output the control signal to a gas controlling valve 6 for controlling gas pressure supplied to the bearing 2 in proportion to the size of the bearing gap S. Thus, a hollow rotary shaft 1 is stably supported with high pressure in the large bearing gap S with low rotational speed, so that the high rigidity of the bearing can be maintained.