Static pressure gas bearing and method of manufacturing static pressure gas bearing

摘要

An object of the present invention is to make it possible to eject compressed gas from a whole surface of a bearing surface with uniform pressure even when the bearing surface is formed in a concave shape or a convex shape in a porous throttle type static pressure gas bearing. A static pressure gas bearing 1 comprises a back metal 2 having a cylindrical chamber 20 and a porous sintered layer 3 disposed in the cylindrical chamber 20 of the back metal 2. The back metal 2 has an air supply port 22 formed on the bottom surface 21 of the cylindrical chamber 20 and a flow path 23 formed radially inward from the outer peripheral surface 24 of the back metal 2 and connected to the air supply port 22. The porous sintered layer 3 is a cylindrical member in which the bearing surface 30 is formed on the surface 31 and is formed vertically inside the cylindrical member 20 with respect to the bottom surface 21 of the cylindrical chamber 20. A first flow path 33 communicating with each other, a second flow path 34 formed parallel to the bottom 21 of the cylindrical chamber 20 along the bearing surface 30, and a second flow formed parallel to the bottom 21 of the cylindrical chamber 20 And a third flow passage 35 connecting the passage 34 to the first flow passage 33. [Selected figure] Figure 1