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FORMATION OF ZINC SELENIDE SINGLE CRYSTAL

机译:硒化锌单晶的形成

摘要

PURPOSE:To form zinc selenide single crystal at temp. of a substrate keeping up low temp. of about 200 deg.C by making any one of the amount of the molecular beam of zinc and selenium constant and continuously increasing the other beam in the molecular beam epitaxial growth of zinc selenide single crystal. CONSTITUTION:Zinc selenide single crystal is formed on the substrate of a semiconductor by projecting the molecular beams of zinc and the molecular beams of selenium on the above-mentioned substrate. In this case, the temp. of the substrate is held at about 200 deg.C and any one of the amount of the molecular beam of zinc and the amount of the molecular beam of selenium is made constant and the other beam is continuously increased.
机译:目的:在温度下形成硒化锌单晶。保持低温的基材的厚度。通过使锌和硒的分子束中的任一个的量恒定,并在硒化锌单晶的分子束外延生长中连续增加另一束,可以使温度约为200℃。组成:硒化锌单晶是通过将锌的分子束和硒的分子束投射到上述衬底上而在半导体衬底上形成的。在这种情况下,温度将衬底的分子束的温度保持在约200℃,使锌的分子束的量和硒的分子束的量中的任一个保持恒定,而另一束连续增加。

著录项

  • 公开/公告号JPS63288999A

    专利类型

  • 公开/公告日1988-11-25

    原文格式PDF

  • 申请/专利权人 SANYO ELECTRIC CO LTD;

    申请/专利号JP19870123564

  • 发明设计人 ISHII HIROAKI;

    申请日1987-05-20

  • 分类号H01L21/363;C30B23/08;C30B29/48;H01L21/203;

  • 国家 JP

  • 入库时间 2022-08-22 06:43:39

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