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Plasma processing apparatus and plasma temperature measuring method
Plasma processing apparatus and plasma temperature measuring method
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机译:等离子体处理装置及等离子体温度测量方法
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摘要
Nitrogen gas plasma emission intensities are theoretically calculated at various gas temperatures, while they are actually measured by a spectroscope. By comparing the waveforms of the calculated and measured emission intensities with each other, the nitrogen gas temperature at an arbitrary point in a plasma treating room can be determined.
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