A method for compensation of the influence of environmental parameters on the imaging properties of an optical system

摘要

in a system that serves schmalbandiger radiation using a template in an image plane received them, make all the more troubling and environmental parameters, the finer the abzubildenden structures. various parameters, such asthe air pressure, change the refractive index of the air, so that the ratio of the refractive index of the refractive index of the material of the focusing system and the calculation of presumed ratio is changed. this has led to a deterioration in the figure.in accordance with the procedure according to the invention, it is possible to keep constant the abbildungseigenschaften system by at least one system parameter is changed. the dependence of this systemparameters of the compensation parameters is determined and stored.in the process, the parameters are measured and, in combination with the stored value, a signal for compensatory adjustment of the systemparameters won. the invention is preferably used in the field of mikrolithographie.