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process for the production of high-purity siliciumnitrid through the direct reaction between elemental silicon and liquid nitrogen - hydrogen reaktionsmitteln
process for the production of high-purity siliciumnitrid through the direct reaction between elemental silicon and liquid nitrogen - hydrogen reaktionsmitteln
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机译:元素硅与液氮的直接反应生产高纯氮化硅的方法-氢离子传导反应;
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摘要
A high purity reaction product consisting essentially of silicon, nitrogen, and hydrogen which can then be heated to produce a high purity alpha silicon nitride is prepared by reacting together a particulate elemental high purity silicon with a high purity nitrogen-hydrogen reactant in its liquid state (such as ammonia or hydrazine) having the formula: NnH(n+m) wherein: n = 1-4 and m = 2 when the nitrogen-hydrogen reactant is straight chain, and 0 when the nitrogen-hydrogen reactant is cyclic. High purity silicon nitride can be formed from this intermediate product by heating the intermediate product at a temperature of from about 1200-1700 DEG C for a period from about 15 minutes up to about 2 hours to form a high purity alpha silicon nitride product.
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