DEVICE FOR SUPPORTING AND THERMALLY CONTROLLING A WORKPIECE AND APPARATUS FOR TESTING PLATES OF SEMICONDUCTOR CIRCUITS INCLUDING SUCH A DEVICE

摘要

P Device 1 for, by simple contact, supporting and holding a part in position and bringing it to a desired negative or positive temperature, the part being maintained by vacuum effect, comprising: a plate 2 thermally conductor with an upper face 7 having at least one groove 8 in communication with a duct 9, 10 for connection with a source of vacuum gas, parallel enclosures 15 provided in the plate 2 and crossed by flows of thermal adjustment fluid at the above positive or negative desired temperature; and a peripheral chamber 16 surrounding the plate 2 and containing a dry gas under pressure distributed by outlet means 18 distributed peripherally and oriented towards the center of the plate so that the dry gas is directed above the surface of the plate and onto the part supported by it in order to prevent the formation of condensation and frost at low temperatures. /P