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Static random access memory having structure of first-, second- and third- level conductive films

机译:具有第一,第二和第三级导电膜的结构的静态随机存取存储器

摘要

A resistance element having a reduced occupied area and a high resistance which may be employed as a load resistor used in, for example, a static memory device. A high-resistance area is formed using a relatively thin film, while an interconnection area is formed using a relatively thick film, and these films are provided in such a manner that the thin film is in contact with the upper side of the thick film (the relatively thick film is a first-level film, and the relatively thin film is a second-level film).
机译:具有减小的占用面积和高电阻的电阻元件可以用作例如在静态存储器件中使用的负载电阻器。使用相对较薄的膜形成高电阻区域,而使用相对较厚的膜形成互连区域,并且以使薄膜与厚膜的上侧接触的方式设置这些膜。相对较厚的膜是第一层膜,而相对较薄的膜是第二层膜。

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