Planar mounting of silicon micromachined sensors for pressure and fluid- flow measurement

摘要

A process for flush-mounting a silicon micromachined sensor for fluid flow measurements with an adjacent face of a substrate. The faces of the substrate and sensor, over which the fluid flow will pass, are disposed face down on a conformal surface. Adhesive is applied between the sensor and substrate to secure the sensor and substrate one to the other. Upon removal from the conformal surface, the faces are cleaned of adhesive and the electrical signal generating means of the sensor are connected with the signal processing means, for example, by wire bonding. In this manner, the sensor lies flush with the face of the substrate, avoiding interference with the fluid flow over the sensor face and, hence, maintaining sensitivity throughout the life of the sensor.