X-RAY PRE-IONIZATION-DISCHARGE EXCITATION PULSE GAS LASER DEVICE

摘要

PURPOSE:To reduce the size of a device and manufacturing cost while lengthening the lifetime of an X-ray source by forming an X-ray irradiation window of a substance composed of the elements of atomic number of 1-12 or these compounds. CONSTITUTION:An X-ray irradiation window 5 is shaped of a substance consisting of the elements of atomic number of 1-12 or these compounds. Consequently, X-rays 9 having the extremely high efficiency of the ionization of a laser gas and long wave length are transmitted through the X-ray irradiation window 5 and can be made to reach up to a discharge space in X-rays 9 generated from an X-ray source 4 arranged outside a laser tube 1, and pre-ionizing electrons in number required for generating uniform glow discharge can be acquired by the total dosage of fewer X-rays 9. Accordingly, the total dosage of the X-ray source 4 used can be diminished, the running cost of a device can be reduced, and the device is miniaturized and manufacturing cost can be curtailed while the lifetime of the X-ray source 4 can be lengthened.