MICRO-DISPLACEMENT MAGNIFYING MECHANISM TEMPERATURE COMPENSATION DEVICE

摘要

PURPOSE:To make a micro-displacement magnifying mechanism stable in displacement independent of the temperature increase of a piezoelectric element by a method wherein a temperature detector, a heat releasing body, and a temperature controlling means all specified respectively are provided. CONSTITUTION:The following are provided to a micro-displacement magnifying mechanism with a temperature compensating member 5: temperature detectors 22-24 which output electrical signals corresponding to the detected temperatures detecting the temperatures of a piezoelectric element 1 and the temperature compensating member 5; a heat releasing body 21 which is fixed to the temperature compensating member 5 in such a manner it is capable of conducting the released heat and releases heat to make the temperature compensating member 5 expand linearly and positively when a required power is supplied; and a temperature control means which supplies a power to the heat releasing body 21 required for making the temperature of the temperature compensating member 5 equal to a temperature corresponding to the positive linear expansion, computing not only the negative linear expansion of the piezoelectric element 2 but also the positive linear expansion of the temperature compensating member 5 for making up for the negative linear expansion of the piezoelectric element 2 receiving the electrical signals outputted from the temperature detectors 22-24 corresponding to the detected temperatures respectively.