PURPOSE: To surely and accurately execute ashing work by providing an inlet and an outlet through the wall of a microwave holding chamber along an ashing furnace for taking a gas in and out from the holding chamber. CONSTITUTION: Air enters a microwave holding chamber 23 surrounded by walls after passing through the grided openings 25 and 27 of both side walls 29 and 31 of the chamber 23. Then the air moves upward and goes out of the chamber 23 through a suction opening, namely, a duct 33 after the air cools an ashing furnace 17 as moving around the furnace 17. Thereafter, the air is exhausted to the outside from an ashing device through an air exhaust duct and a fume hood.
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