METHOD FOR ULTRA-THIN FILM COATING OF SUPERFINE POWDER OR FINE FIBROUS MATERIAL

摘要

PURPOSE:To uniformly form the ultra-thin film of the resulted produce by reactive gases on the surface of superfine powder or fine fibrous material by heating the powder or the material in an atmosphere contg. the reactive gases. CONSTITUTION:An object 1 which is to be treated and consists of the superfine powder or fine fibrous material of metals, alloys, semimetals, intermetallic compds., inorg. compds., or heat resistant org. polymers, etc., is put into a heat resistant crucible 2 made of alumina, etc., and the crucible is put into a heat resistant vessel 4 having a heater 3. The vessel 4 is further put into an external vessel 5 and the inside thereof is evacuated to a high vacuum by a discharge system 6; thereafter, hydrocarbon, CO, H2S, O2, NH3. and other gases are supplied as the reactive gases together with an inert gas, such as Ar, from a gas supply system 8 are supplied therein. The superfine powdery or fine fibrous material 1 to be treated in the crucible 3 is simultaneously heated to, for example, 400 to 1000 deg.C by the heater 3 and the ultra-thin film of the reaction product by the cracking of the reactive gases is formed on the surface thereof.