MANUFACTURE OF THIN MOLYBDENUM SULFIDE FILM, MANUFACTURE OF MOLYBDENUM SULFIDE FILM AND SELF-LUBRICATING LAYER, ELECTRO-OPTICAL LAYER, AND CATALYTICALLY ACTING LAYER

摘要

PURPOSE: To form an MoS film having an excellent characteristic as the self- lubricating layer, electrochemical layer and chemical catalytic layer on the surface of the insulating substrate and conductive substrate by allowing molybdenum hexacarbonyl to react with H₂S in plasma. ;CONSTITUTION: The surface of the substrate consisting of various polymers, plastics, ceramics or metals is previously etched and purified, and then the substrate is put in a reaction vessel. The vessel is evacuated, and then gaseous H₂S as the reactive gas of a volatile sulfur compd. is introduced into the vessel with gaseous Ar or gaseous H₂ as a carrier gas. A high voltage is impressed on the electrode in the vessel to generate a glow discharge, plasma is produced in the presence of the gaseous H₂S, the Mo compd. is allowed to react with the H₂S, and a high-purity MoS₂ film capable of being utilized in various uses is formed on the substrate surface.;COPYRIGHT: (C)1990,JPO