RARE EARTH-TRANSITION METALLIC ALLOY, ITS MANUFACTURE AND TARGET MADE OF RARE EARTH-TRANSITION METALLIC ALLOY

摘要

PURPOSE:To manufacture the title target having extremely low oxygen content by mixing rare earth elements subjected to heat treatment in a hydrogen atmosphere under specific conditions and high purity transition metallic powder having low oxygen content in a nonoxidizing atmosphere and subjecting it to forming and sintering. CONSTITUTION:Rare earth elements such as Tb, Gd, Nd and Dy are subjected to heat treatment in such a manner that they are heated to =1,000 deg.C in a hydrogen gas of =-50 deg.C dew point to extremely reduce the O2 content. After that, they are mixed with the powder of transition metal such as Fe having low O2 content and high purity in a prescribed ratio; the mixture is sintered by hot isostatic pressing treatment under the conditions of high pressure of =800 atmospheric pressure at =800 deg.C in vacuum or in a nonoxidizing atmosphere. The sputtering target made of rare earth-transition metallic alloy having =300ppm O2 content and having excellent strength can be manufactured.