INSTRUMENT FOR MEASURING C-V OF SEMICONDUCTOR

摘要

PURPOSE:To improve the measuring and evaluating speeds of the title instrument by irradiating a semiconductor to be measured with light for desired time at the time of starting sweep. CONSTITUTION:A CPU 15 is respectively connected with a capacity meter 10, DC bias power source 11, and lighting time control circuit 14 through and interface 15 and commands the power source 11 to apply an accurate step voltage across an MOS structure body 12 through the capacity meter 10. The CPU 15 also commands the capacity meter 10 to measure the capacitor of the structure body 12 at accurate timing and fetches the capacitor value. In addition, the CPU 15 commands the circuit 14 so that a light projector 13 can be turned on for fixed time from the sweep starting time. After completing a series of measuring operations, the CPU 15 extracts and processes various parameters related to CV measurement. Since an object to be measured is irradiated with light synchronously to the impression of a voltage in such way, an electron-hole pair is optically produced and the time reguired for setting the object to a stable state can be reduced.