PRODUCTION OF THIN FILM OF YTTRIA STABILIZED ZIRCONIA

摘要

PURPOSE:To obtain the title thin film having excellent adhesivity to substrate by blending an aqueous solution of zirconium salt with an aqueous solution of yttrium salt, subjecting the blend to hydrothermal treatment under saturated water vapor pressure to form sol of mixed oxide, adding an organic thickening agent and applying to the substrate. CONSTITUTION:An aqueous solution of a zirconium salt (e.g., zirconium oxychloride) is blended with an aqueous solution of an yttrium salt (e.g., yttrium chloride) in a pressure container. Then the mixed solution is subjected to hydrothermal treatment under saturated water vapor pressure to form sol of mixed oxide of zirconium and yttrium. Then the sol of mixed oxide is incorporated with an organic thickening agent (e.g., polyvinyl alcohol), applied to a substrate, dried and burnt to give a thin film of yttria stabilized zirconia. The prepared thin film is preferably usable as an oxygen sensor of thin film type, fuel battery of thin film solid electrolyte type, etc.