PURPOSE:To prevent a blur of a light introduction window while checking deterioration in a sealing function due to cooling of a lens barrel by providing a feeding system of liquid or vapor for refrigerant and one or two lens barrels for light introduction or light transmission having a prescribed construction vertically or horizontally. CONSTITUTION:In an optical excitation vapor growth device or the method performing thin film growth on a substrate 6 by introducing light directly on the substrate 6 inside a growth chamber 1 or near the substrate 6 from outside the growth chamber 1 through a window 4 for optically exciting raw material gas 2 to be decomposed, local heating devices 10 are provided near the windows 4 and 4' inside a lens barrel 9 for light introduction and a lens barrel 9' for light transmission provided so that light may pass directly a substrate 6 set up inside the growth chamber 1 or its vicinity, or the buried sheath heaters are provided on the mounting flange parts of the windows for light introduction or light transmission. Further, cooling devices 3 for cooling the lens barrels 9 and 9' are provided near the growth chamber concerned so as to lower vapor pressure of raw material gas near the growth chamber while gastightness of the window-mounting parts is held for a long term by local heating of the window parts.
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