LOW FREQUENCY MINUTE VIBRATION APPLICATION DEVICE

摘要

PURPOSE:To enable evaluation of vibration resistance of precision mechanical equipment by vibrating a table by a piezoelectric element which is supported by several pairs of high rigidity rods using resiliant deformation of parallel springs and can be controlled in its minute displacement. CONSTITUTION:A table 1 is supported by a round bar-shaped rigid rod 2 having at the opposed ends a plurality of arc-shaped circumferential cutouts and being set on a base 8. A minute displacement drive unit 3 and the rod 2 are combined, the unit 3 is set on a base 8, and the rod 2 and table 1 are connected, thereby the table 1 is vibrated in an X direction. The table 1 is also vibrated in a Y direction by two sets of devices comprising the units 3 and the rods 2 connected between a table and the base 8. The unit 3 supports the opposed ends of a flat plate 4 having elastic deformation folcrum 7 in the vicinity of its opposed ends, through a base member 6, and displacement-drives the central part of the flat plate 4 by means of a piezoelectric element. It is thus possible to enable a precision mechanical equipment to evaluate vibration resistance.