METHOD AND DEVICE FOR MEASURING COERCIVE FORCE OF MAGNETIC THIN FILM FORMED BY SLANTING INCIDENCE VAPOR-DEPOSITING METHOD

摘要

PURPOSE:To measure the coercive force of a magnetic thin film nondestructively during its manufacture by irradiating the surface of the magnetic thin film which is formed by a slanting incidence vapor-depositing means with two homogeneous light beams in different directions, and measuring the maximum transmissivity and its transmissivity. CONSTITUTION:The magnetic thin film 2 formed on a transparent glass substrate 1 by the slanting incidence vapor-depositing method is irradiated with homogeneous light beams by light sources 3 and 4 in two different directions, i.e. direction where the light transmittissity in a vapor flow surface when the magnetic thin film is vapor-deposited is maximum and direction which is at a specific direction tens of degrees away from said direction, and respective transmitted light beams are converted by photoelectric converters 5 and 6 into electric signals to measure the maximum transmissivity Tmax and transmissivity Tphi of the homogeneous light in each direction. Arithmetic based upon an equation is carried out by using the measured values to obtain the coercive force Hc of the magnetic thin film by reading a measuring instrument 12.