FORMATION OF GRAFT COPOLYMER AND PATTERN FORMING METHOD UTILIZING THIS FORMING METHOD AS WELL AS BASE POLYMER FOR GRAFT COPOLYMERIZATION AND RESIST

摘要

PURPOSE:To prevent the degradation in graft copolymer forming efficiency by the influence of oxygen in the atm. by adding a material which forms radicals stable to oxygen by bonding to the radicals in a base polymer formed by irradiation of radiations into the base polymer. CONSTITUTION:The material which forms the radicals stable to oxygen by bonding to the radicals of the base polymer 1 generated by irradiation of radiations is added into the base polymer 1 and a mixed film 10 is formed. The film is then irradiated with gamma rays in a vacuum to form the radicals 4 stable to oxygen. After the mixed film 10 is once ejected into the atm. contg. oxygen 5, the film is carried into a graft polymn. reaction chamber and immediately evacuation is started; thereafter, the vapor of a monomer 6 is introduced into the graft polymn. reaction chamber to effect a graft polymn. reaction. The formation of the graft copolymer without degrading the graft polymn. reaction efficiency by the oxygen in the atm. is executed in this way.