Low profile accelerometer with vibrating beam transducer - with symmetrical force sensor positioned w.r.t. plane which is normal to hinge axis

摘要

The compact, low g range accelerometer comprises a support (22), a proof mass (20) and flexures (24,26) for mounting the proof mass to the support, also a force sensing element (40). The proof mass has a single rotational degree of freedom about a hinge axis (H) perpendicular to the accelerometer sensitive axis (S). The force sensing element is positioned along a line that is normal to the hinge axis and that lies in a plane that is normal to the hinge axis and that passes through the centre of gravity (46) of the proof mass. The perpendicular distance between the hinge axis and the force sensing element is less than the distance between the hinge axis and the centre of the proof mass. The force sensing element may be parallel to the pendulous axis, to produce an extremely compact accelerometer, or may be oriented at an acute angle w.r.t. the pendulous axis, such that the line along which the force sensing element is positioned passes through the centre of percussion of the rpproof mass.