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GALLIUM ARSENIDE CRYSTAL GROWN ON SILICON SUBSTRATE AND METHOD OF GROWING SUCH CRYSTAL
GALLIUM ARSENIDE CRYSTAL GROWN ON SILICON SUBSTRATE AND METHOD OF GROWING SUCH CRYSTAL
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机译:在硅基质上生长的砷化镓晶体及其生长方法
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Abstract of the DisclosureA GaAs growth crystal comprises a Si substrate, anintermediate layer formed on the substrate and a GaAs layer grownon the intermediate layer. The intermediate layer includesconstituent GaP/GaAsP and GaAsP/GaAs superlattice layers andadditionally AIP and AlGaP thin films.
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